Structure Load
(kg)
Stroke
(mm)
Speed
(m/s)
Acceleration度
(G)
Repeatability
(um)
Positional Accuracy
(um)
Horizontal Straightness
(um)
Roll Tilt XRX
(arcsec)
Yaw Tilt XRX
(arcsec)
Pitch Tilt XRX
(arcsec)
Motor Power Supply
Marble
Gantry Structure
40 1400 0.7 0.5 1 ±2 5 <10 <10 <10 Three-phase 220V
X